The porous silicon (PSi) layers were formed on p-type silicon (Si) wafer. The six samples were anodised electrically with 30 mA/cm2\r\nfixed current density for different etching times. The structural, optical, and thermal properties of porous silicon on silicon\r\nsubstrates were investigated by photoluminescence (PL), photoacoustic spectroscopy (PAS), and UV-Vis-NIR spectrophotometer.\r\nThe thickness and porosity of the layers were measured using the gravimetric method. The band gap of the samples was measured\r\nthrough the photoluminescence (PL) peak and absorption spectra, then they were compared. It shows that band gap value increases\r\nby raising the porosity. Photoacoustic spectroscopy (PAS) was carried out for measuring the thermal diffusivity (TD) of the\r\nsamples.
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